In this project, research is performed to realize a micro Coriolis mass flow sensor that is suitable for all relevant gases and flow ranges needed in the semiconductor industry. This will require an improvement in zero-stability by a factor 100, and a reduction in noise level by a factor 10, with respect to current state-of-the-art.
Impact
It is expected that an improvement in zero stability by a factor 10 is possible by a redesign of the sensor with optimal placement of the readout electrodes. Overall, we expect that an improvement by the desired factor 100 is feasible. This will allow all relevant gases to be measured with a full-scale range of 5 sccm. Still, it should be noted that an improvement by a factor 10 would already be enough for most gases except for He and H2.