This proposal introduces a next-generation sensor: an ultra-sensitive miniaturized accelerometer made in micro-electromechanical system (MEMS) technology that utilizes patented technology inspired by the search for gravitational waves.
We realized that the possible applications of our sensor systems are manifold. This technology offers solutions to the three main challenges in MEMS accelerometer development: sensitivity, power consumption, and cost. It will address the needs of the geothermal energy and navigation markets and open up opportunities in entirely new markets where smaller, lighter, and cost effective devices can provide intelligent sensing. In this project, a more robust MEMS sensor will be fabricated and integrated with an innovative readout chip that improves sensitivity and reduces energy consumption.